New Micromachined Interdigital Coplanar Waveguide

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2340 IEEE TRANSACTIONS ON MICROWAVE THEORY AND

This paper presents a new concept of MEMS capacitors tunable in multiple discrete and well-defined steps, imple-mented by in-plane moving of the ground sidewalls of a 3-D micromachined coplanar waveguide transmission line. The MEMS actuators are completely embedded in the ground layer of the transmission line, and fabricated using a single-mask

Foundations of Interconnect and Microstrip Design

Foundations of Interconnect and Microstrip Design Third Edition T. C. Edwards and M. B. Steer Engalco and University of Leeds, North Carolina State University

ALGORITHM FOR FAST ELECTROMAGNETIC ANALYSIS OF

and also to suppress leakage in conductor backed coplanar waveguide (CPW) and stripline circuits consists of a periodic array of interdigital capacitor between the signal and ground traces of a 1. I. Paul, and K. J. Vinoy, Design Optimization of Micromachined Ferroelectric based phase shifter using coplanar waveguide, Microw

A HIGH-Q MICROWAVE MEMS RESONATOR

half wavelength) microstrip (or coplanar waveguide) resonator usually has a low quality factor. A solution is to use Substrate Integrated Waveguide (SIW) techniques [1-2]. The SIW resonator and filter takes the advantages of a proper tradeoff between the size and the performance [3]. Using MEMS (microelectronic mechanical systems)

kth.diva-portal

This paper presents a new concept of MEMS capacitors tunable in multiple discrete and well-defined steps, imple-mented by in-plane moving of the ground side-walls of a 3D-micromachined coplanar waveguide transmission line. The MEMS actuators are completely embedded in the ground layer of the transmission line, and fabricated using a single-mask

Coplanar Waveguide Circuits, Components, and Systems

8.5 Attenuation Characteristics of Coplanar Waveguide on Micromachined Silicon Wafer 221 8.5.1 Microshield Line 221 8.5.2 Coplanar Waveguide with V-Shaped Grooves 223 8.5.3 Coplanar Waveguide Suspended by a Silicon Dioxide Membrane over a Micromachined Wafer 223 8.6 Attenuation Constant for Superconducting Coplanar Waveguides 225

Foundations of Interconnect and Microstrip Design

6.10.3 Micromachined structures 216 6.10.4 Leakage suppression and 50 GHz interconnect 216 6.10.5 Light dependence of Silicon FGCPW 217 6.11 Differential line and coplanar strip (CPS) 218 6.12 Summary 223 7 Discontinuities in Microstrip and Stripline 225 7.1 The main discontinuities 225 7.2 The foreshortened open-circuit 227

A HIGH-Q MICROWAVE MEMS RESONATOR

half wavelength) microstrip (or coplanar waveguide) resonator usually has a low quality factor. A solution is to use Substrate Integrated Waveguide (SIW) techniques [1-2]. The SIW resonator and filter takes the advantages of a proper tradeoff between the size and the performance [3]. Using MEMS (microelectronic mechanical systems)

Introduction COPYRIGHTED MATERIAL

well as coplanar waveguide (CPW), and slotlines, which are useful for design of filters. In Chapter 5, conventional microstrip lowpass and bandpass filters, such as stepped-impedance filters, open-stub filters, semilumped element filters, end- and parallel-coupled half-wavelength resonator filters, hairpin-line filters, interdigital and

60 GHz filter - COnnecting REpositories

The measured insertion loss of the interdigital filter is 1.1 dB. The quality-factor of the interdigital resonator is estimated to be 197. A loss of 2.4 dB has been reported for a micromachined comb-line filter at 55 GHz and with a bandwidth of 13.6 % [7].

A Micromachined Zipping Variable Capacitor

In this dissertation, a new micromachined zipping variable capacitor suitable for application at 0.1 to 5 GHz is reported. 2.2.2 Interdigital Gap-Tuned Varactors 3.3.3 Coplanar Waveguide Design